The new edition of the most detailed and comprehensive single-volume reference on major semiconductor devices

The Fourth Edition ofPhysics of Semiconductor Devices remains the standard reference work on the fundamental physics and operational characteristics of all major bipolar, unipolar, special microwave, and optoelectronic devices. This fully updated and expanded edition includes approximately 1,000 references to original research papers and review articles, more than 650 high-quality technical illustrations, and over two dozen tables of material parameters.

Divided into five parts, the text first provides a summary of semiconductor properties, covering energy band, carrier concentration, and transport properties. The second part surveys the basic building blocks of semiconductor devices, including p-n junctions, metal-semiconductor contacts, and metal-insulator-semiconductor (MIS) capacitors. Part III examines bipolar transistors, MOSFETs (MOS field-effect transistors), and other field-effect transistors such as JFETs (junction field-effect-transistors) and MESFETs (metal-semiconductor field-effect transistors). Part IV focuses on negative-resistance and power devices. The book concludes with coverage of photonic devices and sensors, including light-emitting diodes (LEDs), solar cells, and various photodetectors and semiconductor sensors. This classic volume, the standard textbook and reference in the field of semiconductor devices:

Physics of Semiconductor Devices, Fourth Edition is an indispensable resource for design engineers, research scientists, industrial and electronics engineering managers, and graduate students in the field.

S. M. SZE,PHD, is Honorary Chair Professor, College of Electrical and Computer Engineering, National Chiao Tung University, Taiwan. He has made fundamental and pioneering contributions to semiconductor devices, particularly his co-discovery of the floating-gate memory (FGM) effect that has ushered in the Fourth Industrial Revolution. Dr. Sze has authored, co-authored, and edited more than 400 papers and 16 books. He is a celebrated Member of IEEE, an Academician of Academia Simica, and a member of the US National Academy of Engineering.

YIMING LI, PHD, is Full Professor of Electrical and Computer Engineering at National Chiao Tung University, Taiwan. He has been a Visiting Professor in Stanford University, Grenoble INP, and Tohoku University. He has published more than 300 technical articles in journals, conferences, and book chapters. Dr. Li is an active member of IEEE and has served on technical committees for many international professional conferences including IEDM. He is the recipient of the Pan Wen-Yuan Foundation's Research Fellowship Award and the Chinese Institute of Electrical Engineering's Outstanding Young Electrical Engineer Award.

KWOK K. NG, PHD, is now serving on the Industry Advisory Board of the ECE Department of Wayne State University, USA, and as Adjunct Professor at National Chiao Tung University, Taiwan. He joined Bell Telephone Laboratories in 1980, and continued in its spin-offs Lucent Technologies and Agere Systems. He was with SRC (Semiconductor Research Corp.) from 2007 to 2019. Dr. Ng is an IEEE Life Fellow and former Editor ofIEEE Electron Device Letters. He is author of numerous publications, including the bookComplete Guide to Semiconductor Devices.

Preface ix

Author Biography xi

Introduction 1

Part I Semiconductor Physics

Chapter 1 Physics and Properties of SemiconductorsA Review 7

1.1 Introduction, 7

1.2 Crystal Structure, 8

1.3 Energy Bands and Energy Gap, 11

1.4 Carrier Concentration at Thermal Equilibrium, 15

1.5 Carrier-Transport Phenomena, 26

1.6 Phonon, Optical, and Thermal Properties, 47

1.7 Heterojunctions and Nanostructures, 52

1.8 Basic Equations and Examples, 60

Part II Device Building Blocks

Chapter 2 pn Junctions 79

2.1 Introduction, 79

2.2 Depletion Region, 80

2.3 Current-Voltage Characteristics, 91

2.4 Junction Breakdown, 102

2.5 Transient Behavior and Noise, 115

2.6 Terminal Functions, 119

2.7 Heterojunctions, 126

Chapter 3 MetalSemiconductor Contacts 136

3.1 Introduction, 136

3.2 Formation of Barrier, 137

3.3 Current Transport Processes, 155

3.4 Measurement of Barrier Height, 173

3.5 Device Structures, 183

3.6 Ohmic Contact, 190

Chapter 4 MetalInsulatorSemiconductor Capacitors 200

4.1 Introduction, 200

4.2 Ideal MIS Capacitor, 201

4.3 Silicon MOS Capacitor, 214

4.4 Carrier Transport in MOS Capacitor, 241

Part III Transistors

Chapter 5 Bipolar Transistors 263

5.1 Introduction, 263

5.2 Static Characteristics, 264

5.3 Compact Models of Bipolar Transistors, 283

5.4 Microwave Characteristics, 293

5.5 Related Device Structures, 306

5.6 Heterojunction Bipolar Transistor, 312

5.7 Self-Heating Effects, 318

Chapter 6 MOSFETs 329

6.1 Introduction, 329

6.2 Basic Device Characteristics, 334

6.3 Nonuniform Doping and Buried-Channel Device, 360

6.4 Device Scaling and Short-Channel Effects, 373

6.5 MOSFET Structures, 391

6.6 Circuit Applications, 403

6.7 NCFET and TFET, 408

6.8 Single-Electron Transistor, 414

Chapter 7 Nonvolatile Memory Devices 434

7.1 Introduction, 434

7.2 The Concept of Floating Gate, 435

7.3 Device Structures, 440

7.4 Compact Model of Floating-Gate Memory Cells, 447

7.5 Multi-Level Cells and 3-Dimensional Structures, 450

7.6 Applications and Scaling Challenges, 463

7.7 Alternative Structures, 467

Chapter 8 JFETs, MESFETs, and MODFETs 486

8.1 Introduction, 486

8.2 JFET and MESFET, 487

8.3 MODFET, 511

Part IV Negative-Resistance and Power Devices

Chapter 9 Tunnel Devices 539

9.1 Introduction, 539

9.2 Tunnel Diode, 540

9.3 Related Tunnel Devices, 554

9.4 Resonant-Tunneling Diode, 571

Chapter 10 IMPATT Diodes, TED, and RST Devices 585

10.1 Introduction, 585

10.2 IMPATT Diodes, 586

10.3 Transferred-Electron Devices, 616

10.4 Real-Space-Transfer Devices, 636

Chapter 11 Thyristors and Power Devices 649

11.1 Introduction, 649

11.2 Thyristor Characteristics, 650

11.3 Thyristor Variations, 670

11.4 Other Power Devices, 676

Part V Photonic Devices and Sensors

Chapter 12 LEDs and Lasers 697

12.1 Introduction, 697

12.2 Radiative Transitions, 698

12.3 Light-Emitting Diode (LED), 703

12.4 Laser Physics, 715

12.5 Laser Operating Characteristics, 723

12.6 Specialty Lasers, 742

Chapter 13 Photodetectors and Solar Cells 755

13.1 Introduction, 755

13.2 Photoconductor, 759

13.3 Photodiodes, 762

13.4 Avalanche Photodiode, 772

13.5 Phototransistor, 782

13.6 Charge-Coupled Device (CCD), 785

13.7 MetalSemiconductorMetal Photodetector, 799

13.8 Quantum-Well Infrared Photodetector (QWIP), 802

13.9 Solar Cell, 806

Chapter 14 Sensors 835

14.1 Introduction, 835

14.2 Thermal Sensors, 837

14.3 Mechanical Sensors, 843

14.4 Magnetic Sensors, 852

14.5 Chemical Sensors, 862

14.6 Biosensors, 867

Appendices 875

A. List of Symbols, 877

B. International System of Units, 887

C. Unit Prefixes, 888

D. Greek Alphabet, 889

E. Physical Constants, 890

F. Properties of Important Semiconductors, 891

G. The Bloch Theorem and the Periodic Energy in the Reciprocal Lattice, 892

H. Properties of Si and GaAs, 894

I. The Derivations of Boltzmann Transport Equation and Hydrodynamic Model, 895

J. Properties of SiO2 and Si3N4 , 901

K. Compact Models of Bipolar Transistors, 902

L. Discovery of the Floating-Gate Memory Effect, 910

Index 913